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Monolayer Etching of Wurtzite GaN/AlGaN/AlN Using Cyclic O2 Plasma and Atomic Ga/Al Flux Exposure
TS-063466 — In the rapidly evolving world of semiconductor technology, there is a growing demand for efficient and precise methods of etching Gallium Nitride (GaN)-based semiconductors. Traditional wet and dry etching processes often damage the GaN, compromising the quality and performance of the final produc…
  • College: College of Engineering (COE)
  • Inventors: Rajan, Siddharth; Dheenan, Ashok; Rahman, Sheikh Ifatur; Wriedt, Nathan
  • Licensing Officer: Zinn, Ryan

Antimonide based Separate Absorption Charge and Multiplication Avalanche Photodiode
TS-062892 — A room temperature, ultra-high gain (M=278, λ=1550 nm, V=69.5 V, T=296 K) linear mode avalanche photodiode (APD) on an InP substrate using a GaAs0.5Sb0.5/Al0.85Ga0.15As0.56Sb0.44 separate absorption charge and multiplication (SACM) heterostructure.
An APD is a semiconductor-based analog of the photomultiplier. APDs exploit the impact ionization phenomenon and transform infrared (IR) light (l > 850 nm) into photocurrent. APDs have wide applicability; however, existing APDs have insufficient sensitivity and relatively high excess noise an…
  • College: College of Engineering (COE)
  • Inventors: Krishna, Sanjay; Jung, Hyemin; Lee, Seunghyun
  • Licensing Officer: Randhawa, Davinder

Cantilever Design for Measurement of Multi-Physical Properties using Atomic Force Microscopy
TS-036987 — A robust solution that helps researchers increase image and signal accuracy of Atomic Force Microscopy.
Atomic Force Microscopy (AFM) was first used to characterize properties of a sample, including physical, material, electromechanical and chemical properties. For most of these multi-physical characterization schemes, an AFM tip scans over a sample while the tip is in contact with the surface. At t…
  • College: College of Engineering (COE)
  • Inventors: Cho, Han Na "Hanna"; Bergman, Lawrence A; Dharmasena, Sajith; Kim, Seok; Vakakis, Alexander F.
  • Licensing Officer: Zinn, Ryan

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