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Off-Axis Sputtering Deposition System for Growth of Single Crystalline Films
TS-015210 — This innovative deposition system is able to grow single crystalline films of a broad range of complex materials with unprecedented crystalline quality of binary, ternary and quaternary oxides and intermetallics with simple or complex crystal structures.
Sputter deposition is one of the dominant techniques used in manufacturing films and coatings in many industries. Conventional sputtering uses an “on-axis” geometry, i.e., the substrate directly faces the sputter target. Due to the energetic bombardment of sputtered atoms, sputtering i…
  • College: College of Arts & Sciences
  • Inventors: Yang, Fengyuan
  • Licensing Officer: Hong, Dongsung

Efficient Graded III-Nitride Nanowires
TS-014952 — A nanowire that overcomes defect formation normally found in LEDs, leading to higher charge density.
Unlike traditional light bulbs, Light Emitting Diodes (LEDs) use less power, last longer, and contain no environmentally harmful substances. However, LEDs struggle with technical errors, such as lattice mismatch and large resistances. As adoption increases, it is necessary to develop LEDs that are…
  • College: College of Engineering (COE)
  • Inventors: Rajan, Siddharth; Myers, Roberto
  • Licensing Officer: Hong, Dongsung

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