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An Ultra Precision Six-Axis Visual Servo Control System
TS-014929 — A real-time visual measurement of six-degree-of-freedom motion with nanometer precision.
Conventional microscopic visual feedback systems have limited out-of-plane measurement resolution in the micrometer range, and conventional interferometry systems are inherently not real-time sensors. When dealing with dimensions of sub-micrometer range, small pre-calibration errors, e.g. non-orth…
- College: College of Engineering (COE)
- Inventors: Menq, Chia-Hsiang; Kim, Jung
- Licensing Officer: Zinn, Ryan
