TS-061850 — High-qu
ality bet
a-g
alliu
m oxide (&bet
a;-G
a2O3) b
ased se
mi-insul
ating l
ayers en
able high power/high-
frequency electronics, ultr
aviolet optoelectronics,
and
more.
The Need
β-Ga2O3 has spurred substantial interest in semiconductors and transistors in high-power/high-frequency electronics and ultraviolet optoelectronics. However, challenges exist in the controlled doping of semi-insulating layers of β-Ga2O3, limiting the material’s full potenti…